Super High Resolution Darkfield Scattering-Confocal Raman Microscope

actual particle signal. To address this measurement challenge, we also aim at understanding the factors that govern the surface deposition of such nanoparticles to develop methods for their controlled and predictable deposition. These factors include chemical interactions and physical shape of the nanofeatures on the surface of interest. In part of this effort, we will use fluorescence, Raman and dark-field optical microscopies that are powerful tools for detecting nanoparticles down to few nanometers in size. These optical methods tandem with other high-resolution and high-sensitivity surface analytical instrumentations will be used to develop novel methods for rapid particle impurity detection on a chip. In this regard Materials Measurement Science Division (MMSD) of NIST is planning to acquire a super resolution optical microscope with unique capabilities to meet the challenges of this project. MMSD has core expertise in multiscale materials characterization, atomic and nanoscale metrology to address national priorities and support critical and emerging technologies. For reproducible and reliable detection of single particles as well as faint nanoscale emitters on a surface, a great deal of improved sensitivity and speed is needed to detect their fluorescence, and Raman scattering emissions. As such the platform for optical microscopy must have multiple functionalities that could be used in parallel or tandem. Firstly, it must be achromatic (no refractive optics) to provide a large spectral range from ultraviolet (UV) to near infrared (NIR). It must have the optics and detection systems capable of delivering high sensitivity, and high speed that are absolutely essential for detection and collection of light from nanoscale emitters with low quantum efficiencies. It must also be equipped with appropriate monochromatic laser excitation sources and data collection and processing tools. These capabilities should also allow rapid mapping of nanoparticles revealing their surface spatial distribution. This mapping should include maps of the different spectroscopies including Raman, fluorescence, and dark-field light scattering. Moreover, the software and hardware should allow stitching these maps to analyze a large size wafer, while offering high resolution spectra of the nanoparticles. Moreover, to boost the detection sensitivity, the microscope must be compatible for receiving a cryogenic stage for performing low temperature optical microscopy techniques listed earlier. NIST is seeking information from sources that may be capable of providing a solution that will achieve the objectives described above, in addition to the following essential requirements: System Requirements � The instrument must be fully achromatic (no refractive optics) to provide a large spectral range, allowing it to work from 400 nm up to 1600 nm with 2 multichannel detectors (CCD and InGaAs) in a single spectrograph without any exchange of optics in the spectrograph. Furthermore, the system must be ready to allow NIR Raman microscopy. � The instrument should include a flat field Czerny-Turner spectrograph, providing high quality slit image flat over at least 1 inch and then should integrate an air-cooled Open Electrode CCD detector 1 inch long (minimum 1024x256 pixels) sensitive from 200 to 1050nm or more. � The gratings must be easily interchangeable with no limit to the number of gratings that can be added to the system. It is desired that the system offers medium and high spectral resolution by using 2 gratings with different grooves densities, mounted on the same turret. � Must have Class 1 microscope enclosure for laser safety and ambient light control. Lasers � The system should allow to couple permanently up to 6 motorized lasers directly coupled to the microscope. Optical fiber coupling is not accepted. The system must include all the necessary optics, and mechanical adaptations for coupling the lasers, adjusting their power. � 532nm high brightness laser should feature at least the following specifications: Power >100mW, beam diameter<1mm, linewidth<1MHz, M�<1,2 � 633nm high brightness laser should feature at least the following specifications: Power >17mW, beam diameter<1mm, linewidth<1MHz, M�<1,2 � 785nm high brightness laser should feature at least the following specifications: Power >100mW, beam diameter<3mm, beam divergence<1mrad, M�<1,8 Filters � For maximum sensitivity the filters must operate in injection/rejection mode: the same filter reflects the laser into the microscope and rejects the Rayleigh and laser scattered light that is reflected back into the spectrometer. � The Rayleigh filter holder should be motorized and allow adjustment of the angle for each individual filter. � As a standard, without the use of additional expensive ultra-low frequency (ULF) optics, the instrument must allow for 50 � 60 cm-1 low frequency acquisition for its Vis and NIR lasers. � The instrument should offer access to very low wavenumber spectral regions below 50 cm-1 using Edge filters mounted on motorized kinematic mounts for quick wavelength change without any alignment. Mapping � The instrument should be equipped with a motorized X-Y computer-controlled stage with 10 nm minimum step-resolution and motorized Z-axis with step-resolution of 10 nm or better. � The system must allow fast Raman imaging with an acquisition time of ?5 ms per spectrum (without the use of an EMCCD) with any laser and objective configuration by allowing the CCD shutter to be open and collecting at discrete time intervals, while retaining confocality. � The instrument should be equipped with two XY Piezo mirror scanners for laser rastering. The Piezo scanner should be able map with nanometric steps for more accurate and precise mapping than a motorized X-Y stage. � The Piezo scanner should allow confocal mapping without stage movement, within the objective field of view. The Piezo scanner should be able map with nanometric steps over several tens of square micrometers without moving the sample enabling mapping in environmental cells such as a CryoAdvance-50 by Montana Instruments. � The Piezo scanner should allow averaging an area within the objective to prevent photobleaching or laser damage of the materials. � The Piezo scanner should be capable of generating a macro spot. The system should be able to combine XYZ motorized stage capability with a macro spot capability to map large dimensions samples within a short time. The macro spot dimensions should be adjustable to the type of sample, from a line to a square or a rectangle. Microscope � The instrument should include a true confocal microscope, which must be fully and permanently integrated in the main frame of the system and directly coupled to spectrometer to ensure highest spatial resolution, sensitivity and stability. Fiber coupling is not acceptable as this compromises ease of use. Motorized confocal pinhole should be continuously adjustable and computer controlled, to adjust the probed volume according to the type of sample. Microscope options � The system should include a rigidly attached free space microscope with high quality optics. It is desired that the objectives turret moves rather than the stage to allow big samples or cryostats to be used under the microscope such as a Closed Loop Montana Cryostat, CryoAdvance-50. � Polarization, DIC and phase